| Description |
1 online resource (xvi, 870 pages) |
| Contents |
Theory of Ellipsometry -- Polarized Light and Ellipsometry -- Optical Physics of Materials -- Data Analysis for Spectroscopic Ellipsometry -- Instrumentation -- Optical Components and the Simple PCSA (Polarizer, Compensator, Sample, Analyzer) Ellipsometer -- Rotating Polarizer and Analyzer Ellipsometry -- Polarization Modulation Ellipsometry -- Multichannel Ellipsometry -- Critical Reviews of Some Applications -- SiO2 Films -- Theory and Application of Generalized Ellipsometry -- Emerging Areas in Ellipsometry -- VUV Ellipsometry -- Spectroscopic Infrared Ellipsometry -- Ellipsometry in Life Sciences |
| Summary |
Ever progressive miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research are propelling ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, to greater popularity in a widening array of applications. Ellipsometry, without contact and non-damaging to samples, is an ideal measurement technique to determine optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications occurring today, this book provides a much needed foundation of the science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, fiber optics, biotechnology, and pharmaceuticals. Divided into four sections, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas |
| Bibliography |
Includes bibliographical references |
| Notes |
Online resource; title from PDF title page (SpringerLink, viewed April 2, 2024) |
| Subject |
Ellipsometry -- Handbooks, manuals, etc
|
| Form |
Electronic book
|
| Author |
Tompkins, Harland G., editor.
|
|
Irene, Eugene A., editor.
|
| ISBN |
9783540274889 |
|
354027488X |
|
