Title Rare-earth implanted MOS devices for silicon photonics : microstructural, electrical and optoelectronic properties / Lars Rebohle, Wolfgang Skorupa

Published Heidelberg : Springer, 2010

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Description 1 online resource (xviii, 173 pages) : illustrations Series Springer series in materials science, 0933-033X ; 142 Springer series in materials science ; 142. 0933-033X Contents Silicon-based light emission -- Microstructure -- Electrical properties -- Electroluminescence spectra -- Electroluminescence efficiency -- Stability and degradation -- Applications Summary This book concentrates on the microstructural, electric and optoelectronic properties of rare-earth implanted MOS structures and their use as light emitters in potential applications. It describes the structural formation processes in the gate oxide during fabrication and under operation, how this microstructure development will affect the electrical device performance and how both microstructure and electrical characteristics determine the optoelectronic features of the light emitters. However, most of the discussed physical processes as well as the described fabrication methods and device ch Bibliography Includes bibliographical references (pages 159-170) and index Notes Print version record Subject Metal oxide semiconductors. COMPUTERS -- Computer Engineering. COMPUTERS -- Hardware -- General. COMPUTERS -- Machine Theory. Physique. Metal oxide semiconductors Form Electronic book Author Rebohle, Lars. Skorupa, Wolfgang. ISBN 9783642144479 3642144470

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