| Description |
1 online resource |
| Series |
Springer series in advanced microelectronics, 1437-0387 ; v. 43 |
|
Springer series in advanced microelectronics ; v. 43.
|
| Contents |
Introduction to High-k Gate Stacks / Samares Kar -- MOSFET: Basics, Characteristics, and Characterization / Samares Kar -- Hafnium-Based Gate Dielectric Materials / Akira Nishiyama -- Hf-Based High-k Gate Dielectric Processing / Masaaki Niwa -- Metal Gate Electrodes / Jamie K. Schaeffer -- V FB /V TH Anomaly in High-k Gate Stacks / Akira Toriumi, Toshihide Nabatame -- Channel Mobility / Chadwin Young -- Reliability Implications of Fast and Slow Degradation Processes in High-k Gate Stacks / Gennadi Bersuker -- Lanthanide-Based High-k Gate Dielectric Materials / Daniel J. Lichtenwalner -- Ternary HfO₂ and La₂O₃ Based High-k Gate Dielectric Films for Advanced CMOS Applications / Akira Toriumi, Koji Kita -- Crystalline Oxides on Silicon / H. Jörg Osten -- High Mobility Channels / Michel Houssa, Peide Ye, Marc Heyns |
| Summary |
"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, metal gate electrodes, flat-band and threshold voltage tuning, channel mobility, high-k gate stack degradation and reliability, lanthanide-based high-k gate stack materials, ternary hafnia and lanthania based high-k gate stack films, crystalline high-k oxides, high mobility substrates, and parameter extraction. Each chapter begins with the basics necessary for understanding the topic, followed by a comprehensive review of the literature, and ultimately graduating to the current status of the technology and our scientific understanding and the future prospects." |
| Analysis |
Engineering |
|
Electronics |
|
Optical materials |
|
Electronics and Microelectronics, Instrumentation |
|
Solid State Physics |
|
Spectroscopy and Microscopy |
| Bibliography |
Includes bibliographical references and index |
| Notes |
English |
| Subject |
Dielectrics.
|
|
SCIENCE -- Physics -- Electricity.
|
|
SCIENCE -- Physics -- Electromagnetism.
|
|
Ingénierie.
|
|
Dielectrics
|
| Form |
Electronic book
|
| Author |
Kar, S. (Samares), 1942-
|
| ISBN |
9783642365355 |
|
3642365353 |
|
3642365345 |
|
9783642365348 |
|
