| Description |
1 online resource (x, 401 pages) : illustrations |
| Series |
Microsystems ; v. 17 |
|
Microsystems (Series) ; v. 17.
|
| Contents |
Microcantilevers and Microbridges: Bending and Torsion Resonant Frequencies.- Micromechanical Systems: Modal Analysis.- Energy Losses in MEMS and Equivalent Viscous Damping.- Frequency and Time Response of MEMS |
| Summary |
Review: "This work presents a view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mechanical/structural micro domain and the compliant nature of mechanical transmission." "Features of this work include: an in-depth treatment of problems that involve reliable modeling, analysis and design; analytical models with correct dependences on service dimensions, cantilever based systems for nanofabrication researchers and designers; and dynamics of complex spring and beam microsystems." "This book contains fully-solved examples as well as end-of-the-chapter proposed problems. Dynamics of Microelectromechanical Systems is a reference for microstructural engineers, microengineers, and MEMS specialists." |
| Bibliography |
Includes bibliographical references and index |
| Notes |
English |
|
Print version record |
| In |
Springer eBooks |
| Subject |
Microelectromechanical systems.
|
|
Microstructure.
|
|
Micro-Electrical-Mechanical Systems
|
|
microstructure.
|
|
Ingénierie.
|
|
Microelectromechanical systems
|
|
Microstructure
|
| Form |
Electronic book
|
| ISBN |
9780387681955 |
|
0387681957 |
|
9780387368009 |
|
0387368000 |
|
1441942254 |
|
9781441942258 |
|
