Nanoelectromechanical systems -- NanoMEMS physics: quantum wave-particle phenomena -- NanoMEMS physics: quantum wave phenomena -- NanoMEMS applications: circuits and systems -- NanoMEMS applications: photonics
Summary
Offering an exposition of the physical principles at the heart of NanoMEMS-based devices and applications, this book presents the fundamentals and limitations of nanotechnology and MEMS fabrication techniques. It addresses the physics operating on this scale, namely, quantum wave-particle phenomena, and quantum wave phenomena
Bibliography
Includes bibliographical references (pages 241-252) and index
