| Description |
1 online resource (xvii, 289 pages) : illustrations |
| Series |
Micro & nano technologies series |
|
Micro & nano technologies.
|
| Contents |
Note continued: 3.3.6. Patterning Ceramic Materials at Nanoscale Resolution -- 3.4. Speciality Substrates -- 3.4.1. Silicon-on-Insulator (SOI) -- 3.4.2. Electro-Optic Substrates -- 3.5. Advanced Non-Silicon and Silicon Hybrid Devices -- 3.5.1. Nanofabrication of Information Storage Devices -- 3.5.2. Integrated Optics -- 3.6. Planar Lightwave Circuits -- 3.7. Fabrication Example of an Integrated Optical Device -- 3.8. Integrated Optics in the MST Foundry Service Industry: A Case Study -- 3.9. Conclusions -- References -- 4.1. Top-Down, Bottom-Up -- 4.1.1. Nanolithography -- 4.1.2. Introduction to the Need for New Lithographic Techniques -- 4.1.3. Nanolithographic Techniques -- 4.1.4. Top-Down Nanolithographic Principles -- 4.1.5. Nanolithographic Technologies for the Microelectronics Industry -- 4.1.6. Nanoimprint Technology -- 4.1.7. Case Studies: Nanoimprint Applications -- 4.1.8. Emerging Nanolithographic Technologies -- 4.1.9. Nanolithography in R & D |
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Note continued: 4.1.10. LIL Development at MESA+ NanoLab NL -- 4.1.11. Case Study: Laser Interference Lithography Nanoarrays for Cell Biology -- 4.1.12. Concluding Remarks on Emerging Nanolithography -- 4.2. Nanomaterials -- 4.2.1. Ordered Oxides -- 4.2.2. Oxide Nanoarrays: Definitions and Background -- 4.2.3. Principles of Oxide Nanoarray Fabrication -- 4.2.4. Ordered Oxides in Medical Applications -- 4.3. Where Are We9 -- 4.4. Where to Go from Here? -- References -- 5.1. Application Fields -- 5.2. Overview of Materials -- 5.2.1. Single Crystals -- 5.2.2. Amorphous Materials -- 5.3. Thick and Thin Film Hybrid Materials -- 5.4. Microactuation -- 5.5. Packaged Sensors -- 5.5.1. From Die to Device Level -- 5.5.2. From Device Level to System -- 5.6. Silicon as a Mechanical Material in Resonant Microdevices -- 5.6.1. Resonant Sensors -- 5.6.2. Diaphragms as Micromechanical Couplers -- 5.7. Information Society -- 5.7.1. Micro-Opto-Electromechanical Systems -- 5.8. Conclusions -- References |
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Note continued: 6.1. Application Field -- 6.2. Sensor Principles for the Collection of (Bio)Chemical Information -- 6.2.1. Optical Techniques -- 6.2.2. Electrochemical Techniques -- 6.2.3. Methodology of Sensor Development -- 6.3. Integrated chemFET Device: Case Study of a Semiconductor-Based pH Sensor Development -- 6.4. Integrated Clinical Diagnostics: A Medical Application for Electrochemical Sensor Arrays -- 6.4.1. From Microarray to Biochip Technology -- 6.4.2. Cell-Based Biosensor -- 6.5. Conclusions -- References -- 7.1. Application Fields -- 7.2. Microfluidic Components -- 7.2.1. Passive Microvalves -- 7.2.2. Active Microvalves -- 7.3. Controlled Transport by Diffusion -- 7.4. Integration for Microfluidic Transport, Sensing and Dispensing -- 7.5. Lab-on-a-Chip -- 7.5.1. Miniaturized Particle and Cell Sorting Devices -- 7.5.2. Cell Cultures and Fermentation Processes on Chip -- 7.6. Device-to-World Connections: The MATAS Concept |
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Note continued: 7.7. From the Lab Bench to Industry: Microchip Capillary Electrophoresis -- 7.7.1. Is There a Need for a Microfluidic-Integrated System at the Doctor's Surgery? -- 7.7.2. The Technology Behind the Lithium Case -- 7.7.3. Microchip Capillary Electrophoresis Instrumentation -- 7.7.4. Sample to Chip Interface -- 7.7.5. Samples -- 7.7.6. Results and Conclusions from the LICETAS Project -- 7.8. Conclusions -- References -- 8.1. Microneedle Research at University of Twente and its Spin-Off -- 8.1.1. Desk Research: Microneedle Arrays, Microfabrication and Transdermal Delivery of Insulin -- 8.1.2. Is There a Need for Microneedles? -- 8.1.3. Microneedles by Microfabrication Technologies -- 8.1.4. Are Microneedles Ready for Insulin Delivery? -- 8.1.5. Design Aspects for Microneedle Insulin Delivery -- 8.2. MNA-4-Insulin: A Brief Evaluation -- 8.3. Conclusions -- References -- 9.1. Environmental Aspects -- 9.2. Health Aspects of Nanoparticles -- 9.3. Conclusions -- References |
| Summary |
This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc.; Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments; Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro; Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs); Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT); Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling |
| Bibliography |
Includes bibliographical references and index |
| Notes |
English |
| Subject |
Manufacturing processes.
|
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Microfabrication.
|
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manufacturing.
|
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SCIENCE -- Nanoscience.
|
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TECHNOLOGY & ENGINEERING -- Nanotechnology & MEMS.
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Manufacturing processes
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Microfabrication
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| Form |
Electronic book
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| LC no. |
2011926754 |
| ISBN |
9780815519775 |
|
081551977X |
|
1280582413 |
|
9781280582417 |
|
9786613612199 |
|
6613612197 |
|
9780080947624 |
|
008094762X |
|
