| Description |
1 online resource |
| Series |
STP ; 1413 |
|
ASTM special technical publication ; 1413
|
| Summary |
Annotation Recent advances in the mechanical properties of structural films are described in these papers from a November 2000 symposium held in Orlando, Florida. Papers are organized in sections on fracture and fatigue of structural films, elastic behavior and residual stress in thin films, tensile testing of structural films, and thermomechanical, wear, and radiation damage of structural films. Specific topics include fatigue and fracture in membranes for MEMS power generation, derivation of elastic properties of thin films from measured acoustic velocities, determining the strength of brittle thin films for MEMS, and the effects of radiation of the mechanical properties of polysilicon and polydiamond thin films. Annotation copyrighted by Book News, Inc., Portland, OR |
| Bibliography |
Includes bibliographical references and indexes |
| Subject |
Thin films -- Mechanical properties -- Congresses.
|
| Genre/Form |
Conference papers and proceedings.
|
| Form |
Electronic book
|
| Author |
Brown, Stuart B.
|
|
Muhlstein, Christopher L., 1971-
|
|
ASTM International.
|
|
American Society for Testing and Materials.
|
| ISBN |
0803154585 |
|
9780803154582 |
|
