1 online resource (xviii, 412 pages) : color illustrations
Contents
1. Integration of multi-gate devices (FinFET) -- 2. Circuit-related aspects -- 3. Exploratory devices and characterization tools
Summary
<STRONG>General Introduction Part 1: Integration of Multigate Devices (FinFET) </STRONG>Introduction to Multigate Devices and Integration Challenges Patterning Requirements for Multigate Devices Gate Stack Design Source/Drain Design: Reduction of Parasitic Resistance <STRONG>Part 2: Circuit-Related Aspects </STRONG>Variability and Its Implications for FinFET SRAM High T Performance of FinFET ESD and Multigate Devices <STRONG>Part 3: Beyond FinFET </STRONG>The Junctionless Nanowire Transistor Transport in Nanostructures Transport Spectr
