Title Semiconductor strain metrology : principles and applications / Terence K.S. Wong

Published [Saif Zone, Sharjah, U.A.E] ; Oak Park, IL : Bentham Science, [2012]

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Description 1 online resource (136 pages) : illustrations Bibliography Includes bibliographical references and index Subject Semiconductors -- Design and construction -- Materials Compound semiconductors -- Design and construction -- Materials Silicon-on-insulator technology. TECHNOLOGY & ENGINEERING -- Electronics -- Circuits -- General. TECHNOLOGY & ENGINEERING -- Electronics -- Circuits -- Integrated. Silicon-on-insulator technology Form Electronic book ISBN 9781608053599 1608053598

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