| Description |
1 online resource (152 pages) : illustrations |
| Contents |
Propagation of Acoustic Wave in Crystals -- The Theory of FBAR -- The Deposition and Etching of AlN Film -- The FBAR with Membrane Structure -- Solidly Mounted Acoustic Resonator -- The Applications of FBAR in RF Filters -- The FBAR Excited by Lateral Filed -- High Sensitive Sensors Based on FBAR |
| Summary |
"Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education's Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang's research group"--Provided by publisher |
| Analysis |
Engineering |
|
Nanotechnology and Microengineering |
|
Solid State Physics |
|
Surfaces and Interfaces, Thin Films |
|
Surfaces (Physics) |
| Bibliography |
Includes bibliographical references and index |
| Notes |
Print version record |
| Subject |
Radio resonators -- Design and construction
|
|
Radio frequency integrated circuits -- Design and construction
|
|
Thin films, Multilayered.
|
|
TECHNOLOGY & ENGINEERING -- Mechanical.
|
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Ingénierie.
|
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Radio frequency integrated circuits -- Design and construction
|
|
Radio resonators -- Design and construction
|
|
Thin films, Multilayered
|
| Form |
Electronic book
|
| Author |
Chen, Da (Shanghai Jiao Tong University)
|
| ISBN |
9783642317767 |
|
3642317766 |
|
