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Author
Osten, Wolfgang
Title
Optical Inspection of Microsystems, Second Edition
Edition
2nd ed
Published
Milton : CRC Press LLC, 2019
©2020
Click on the following:
ProQuest Ebook Central
Copies
Description
1 online resource (585 pages)
Notes
Publisher supplied metadata and other sources
Subject
Microelectromechanical systems-Inspection
Quality control -- Optical methods.
Optical measurements.
Industrial microscopy.
Industrial microscopy.
Optical measurements.
Quality control -- Optical methods.
Form
Electronic book
ISBN
9781498779500
1498779506
0429547358
9780429547355
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