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Subjects (1-14 of 14)
Plasma etching.
1
2014
Dry etching technology for semiconductors
Nojiri, Kazuo, author
Cham : Springer, [2014]
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2
2014
Feature profile evolution in plasma processing using on-wafer monitoring system
Samukawa, Seiji, author
Tokyo : Springer, [2014]
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3
2000
Handbook of advanced plasma processing techniques
Berlin ; New York : Springer, [2000]
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Vol.
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W'PONDS
621.044 Shu/Hoa
AVAILABLE
4
1990
Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions
Park Ridge, N.J., U.S.A. : Noyes Publications, [1990]
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W'PONDS
621.044 Ros/Hop
AVAILABLE
5
1990
Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions
Rating:
Electronic Resources
6
2009
Low pressure plasmas and microstructuring technology
Franz, Gerhard, Dr. rer. nat.
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7
2009
Micromachining using electrochemical discharge phenomenon : fundamentals and applications of spark assisted chemical engraving
Wüthrich, Rolf.
1st ed
Rating:
Electronic Resources
8
2014
Micromachining using electrochemical discharge phenomenon : fundamentals and applications of spark assisted chemical engraving
Wüthrich, Rolf, author.
Second edition
©2015
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Electronic Resources
9
2017
Plasma etching processes for CMOS device realization
London, UK : ISTE Press ; Kidlington, Oxford, UK : Elsevier, 2017
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Electronic Resources
10
2015
Plasma etching processes for interconnect realization in VLSI
London : ISTE Press ; Oxford : Elsevier Ltd, 2015
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Electronic Resources
11
1995
Plasma processing and processing science
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12
1994
Plasma sources for thin film deposition and etching
Boston : Academic Press, 1994
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W'PONDS
530.4175 Fra/Psf
AVAILABLE
13
2005
Principles of plasma discharges and materials processing
Lieberman, M. A. (Michael A.)
Second edition
Hoboken, N.J. : Wiley-Interscience, [2005]
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W'PONDS
530.44 Lie/Pop
AVAILABLE
14
2005
Principles of plasma discharges and materials processing
Lieberman, M. A. (Michael A.), author
Second edition
Hoboken, N.J. : Wiley-Interscience, [2005]
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