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Subjects (1-14 of 14)
Plasma etching.
1
E-book
2014

Dry etching technology for semiconductors


Nojiri, Kazuo, author

Cham : Springer, [2014]

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2
E-book
2014

Feature profile evolution in plasma processing using on-wafer monitoring system


Samukawa, Seiji, author

Tokyo : Springer, [2014]

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3
Book
2000

Handbook of advanced plasma processing techniques




Berlin ; New York : Springer, [2000]

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Location Call no. Vol. Availability
 W'PONDS  621.044 Shu/Hoa  AVAILABLE
4
 
Location Call no. Vol. Availability
 W'PONDS  621.044 Ros/Hop  AVAILABLE
6
E-book
2009

Low pressure plasmas and microstructuring technology


Franz, Gerhard, Dr. rer. nat.



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9
E-book
2017

Plasma etching processes for CMOS device realization




London, UK : ISTE Press ; Kidlington, Oxford, UK : Elsevier, 2017

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10
E-book
2015

Plasma etching processes for interconnect realization in VLSI




London : ISTE Press ; Oxford : Elsevier Ltd, 2015

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12
Book
1994

Plasma sources for thin film deposition and etching




Boston : Academic Press, 1994

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Location Call no. Vol. Availability
 W'PONDS  530.4175 Fra/Psf  AVAILABLE
13
Book
2005

Principles of plasma discharges and materials processing


Lieberman, M. A. (Michael A.)
Second edition
Hoboken, N.J. : Wiley-Interscience, [2005]

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Location Call no. Vol. Availability
 W'PONDS  530.44 Lie/Pop  AVAILABLE
14
E-book
2005

Principles of plasma discharges and materials processing


Lieberman, M. A. (Michael A.), author
Second edition
Hoboken, N.J. : Wiley-Interscience, [2005]

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