Deakin University / All Locations

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Subjects (1-6 of 6)
Photoresists.
1 2016 Design for manufacturability with advanced lithography Yu, Bei, author Cham : Springer, 2016 Rating: Electronic Resources More...
2 1993 Diazonaphthoquinone-based resists Dammel, Ralph, 1954- author. Bellingham, Washington : SPIE Optical Engineering Press, 1993 Rating: Electronic Resources
3 2010 Emission scenario document on photoresist use in Semiconductor manufacturing Paris : IOMC/Environment Directorate, Organisation for Economic Co-operation and Development, 2010 Rating:
4 2016 Materials and Processes for Next Generation Lithography Rating: Electronic Resources
5 2015 Photopolymers : photoresist materials, processes, and applications Nakamura, Kenichiro (Chemical engineer), author. Boca Raton, FL : CRC Press, Taylor & Francis Group, [2015] Rating: Electronic Resources
6 2018 Photopolymers : photoresist materials, processes, and applications Nakamura, Kenichiro (Chemical engineer), author. [Place of publication not identified] : CRC Press, 2018 Rating: Electronic Resources
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Design for manufacturability with advanced lithography