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Book Cover
E-book
Author Nakamura, Kenichiro (Chemical engineer), author.

Title Photopolymers : photoresist materials, processes, and applications / Kenichiro Nakamura
Published Boca Raton, FL : CRC Press, Taylor & Francis Group, [2015]
©2015

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Description 1 online resource (x, 188 pages) : illustrations
Series Optics and Photonics ; 10
Optics and photonics (Boca Raton, Fla.) ; 10.
Contents Basic Idea of Photopolymerization -- Chemically Amplified Resists -- Process of Chemically Amplified Resists -- Nanoimprint -- Industrial Application of Photopolymers
Summary "Advancements in photopolymers have led to groundbreaking achievements in electronic, optical, and medical engineering. At present, photopolymers have myriad applications in semiconductor device manufacturing, printed circuit boards (PCBs), ultraviolet (UV) curing, microelectromechanical systems (MEMS), and medical materials. Addressing topics such as chemically amplified resists, immersion lithography, extreme ultraviolet (EUV) lithography, and nanoimprinting, this book covers photopolymers from core concepts to industrial applications, providing the chemical formulae and structures of the materials discussed as well as practical case studies from some of the world's largest corporations"-- Provided by publisher
Bibliography Includes bibliographical references and index
Notes Print version record
Subject Photopolymers.
Photoresists.
Photopolymerization.
Photopolymers -- Industrial applications
Microelectronics -- Materials
TECHNOLOGY & ENGINEERING -- Engineering (General)
TECHNOLOGY & ENGINEERING -- Reference.
Microelectronics -- Materials
Photopolymerization
Photopolymers
Photopolymers -- Industrial applications
Photoresists
Form Electronic book
ISBN 9781466517318
146651731X