Title Developments in surface contamination and cleaning : particle deposition, control and removal / edited by Rajiv Kohli and Kashmiri L. Mittal

Published Amsterdam ; Boston : Elsevier/William Andrew, ©2010

Click on the following:
Knovel

Copies

Description 1 online resource (xv, 286 pages, 8 pages of plates) : illustrations (some color) Contents Particle Deposition onto Enclosure Surfaces; Contamination Control: A Systems Approach; Particles in Semiconductor Processing; Continuous Contamination Monitoring Systems; Strippable Coatings for Removal of Surface Contaminants; Ultrasonic Cleaning [V. 1.] Fundamentals and applied aspects -- v. 2. Particle deposition, control and removal Bibliography Includes bibliographical references and index Notes Print version record Subject Surfaces (Technology) Surface contamination -- Prevention Particles -- Measurement Cleaning. Coatings. Dust control. cleaning. coating (material) Cleaning Coatings Dust control Particles -- Measurement Surfaces (Technology) Form Electronic book Author Kohli, Rajiv, 1947- Mittal, K. L., 1945- ISBN 9781437778311 1437778313 9781437778304 1437778305

Other Titles Particle deposition, control and removal

  Permalink