| Description |
1 online resource (xliii, 1164 pages) : illustrations (some color) |
| Contents |
Introduction -- Part 1: Fundamentals -- The Physical Nature of Very, Very Small Particles and its Impact on their Behavior -- Elucidating the Nature of Very Small Particles -- Transport and Deposition of Aerosol Particles -- Relevance of Particle Transport in Surface Deposition and Cleaning -- Tribological Implications of Particles -- Airborne Molecular Contamination -- Engineering Aspects of Particle Adhesion and Removal -- ESD Controls in Cleanroom Environments: Relevance to Particle Deposition -- Part 2: Characterization of Surface Contaminants -- Electron Microscopy Techniques for Imaging and Analysis of Nanoparticles -- Surface Analysis Methods for Contaminant Identification -- Ionic Contamination and Analytical Techniques for Ionic Contamination -- Relevance of Colorimetric Interferometry for Thin Surface Film Contaminants -- Wettability Techniques to Monitor the Cleanliness of Surfaces -- Part 3: Methods for Removal of Surface Contamination -- The Use of Surfactants to Enhance Particle Removal from Surfaces -- Cleaning with Solvents -- Removal of Particles by Chemical Cleaning -- Cleaning Using High-Speed Impinging Jet -- Microabrasive Precision Cleaning and Processing Technology -- Precision Cleaning Using Microdroplet Beams -- Cleaning Using Argon/Nitrogen Cryogenic Aerosols -- Carbon Dioxide Snow Cleaning -- Coatings for Preventing or Deactivation of Biological Contaminants -- Detailed Study of Semiconductor Wafer Drying |
| Summary |
Surface contamination is of cardinal importance in a host of technologies and industries, ranging from microelectronics to optics to automotive to biomedical. Thus, the need to understand the causes of surface contamination and their removal is very patent. Generally speaking, there are two broad categories of surface contaminants: film-type and particulates. In the world of shrinking dimensions, such as the ever-decreasing size of microelectronic devices, there is an intensified need to understand the behavior of nanoscale particles and to devise ways to remove them to an acceptable level. Particles which were functionally innocuous a few years ago are "killer defects" today, with serious implications for yield and reliability of the components. This book addresses the sources, detection, characterization and removal of both kinds of contaminants, as well as ways to prevent surfaces from being contaminated. A number of techniques to monitor the level of cleanliness are also discussed. Special emphasis is placed on the behaviour of nanoscale particles. The book is amply referenced and profusely illustrated." Excellent reference for a host of technologies and industries ranging from microelectronics to optics to automotive to biomedical." A single source document addressing everything from the sources of contamination to their removal and prevention." Amply referenced and profusely illustrated |
| Bibliography |
Includes bibliographical references and index |
| Notes |
Print version record |
| Subject |
Surfaces (Technology) -- Inspection
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Surface contamination -- Prevention
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Particles -- Measurement
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Cleaning.
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Coatings.
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Dust control.
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Surfaces (Technology) -- Analysis.
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Surface contamination.
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Surface preparation.
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cleaning.
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coating (material)
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TECHNOLOGY & ENGINEERING -- Nanotechnology & MEMS.
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Surfaces (Technology) -- Analysis
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Surface preparation
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Surface contamination
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Cleaning
|
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Coatings
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Dust control
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Particles -- Measurement
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Surfaces (Technology) -- Inspection
|
| Form |
Electronic book
|
| Author |
Kohli, Rajiv, 1947-
|
|
Mittal, K. L., 1945-
|
| ISBN |
9780815516859 |
|
0815516851 |
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