Title Applied Optical Metrology IV / edited by Erik Novak, James D. Trolinger, Christopher C. Wilcox

Published Bellingham, Washington : SPIE / International Society for Optical Engineering, 2021

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Description 1 online resource Series SPIE ; 11817 Proceedings of SPIE--the International Society for Optical Engineering ; v. 11817. Summary Proceedings of SPIE offer access to the latest innovations in research and technology and are among the most cited references in patent literature. The papers in this volume were part of the technical conference on Applied Optical Metrology IV held on 1-5 August 2021, San Diego, California, United States In Online access: SPIE - The International Society for Optical Engineering SPIE Digital Library - Conference Proceedings Subject Metrology. Optical measurements. Metrology Optical measurements Form Electronic book ISBN 9781510644731 1510644733

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