Limit search to available items
Book Cover

Title Optical inspection of microsystems / edited by Wolfgang Osten
Edition Second edition
Published Boca Raton, FL : CRC Press/Taylor & Francis Group, [2020]
Online access available from:
ProQuest Ebook Central Subscription    View Resource Record  


Description 1 online resource : illustrations
Contents Image processing and computer vision for MEMS testing -- Surface features -- A metrological characteristics approach to uncertainty in surface metrology -- Image correlation techniques for microsystems inspection -- Light scattering techniques for the inspection of microcomponents and structures -- Characterization and measurement of microcomponents with the atomic force microscope (AFM) -- Optical profiling techniques for MEMS measurement -- Grid and moiré methods for micromeasurements -- Grating (moiré) interferometry for in-plane displacement and strain measurement of microcomponents -- Interference microscopy techniques for microsystem characterization -- Measuring MEMS in motion by laser dopler vibrometry -- An interferometric platform for static, quasi-static, and dynamic evaluation of out-of-plane deformations of MEMS and MOEMS -- Optoelectronic holography for testing electronic packaging and MEMS -- Digital holography and its application in MEMS/MOEMS inspection -- Speckle metrology for microsystem inspection -- Spectroscopic techniques for MEMS inspection -- Sensor fusion in multiscale inspection systems -- Index
Summary Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book: Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems; Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques; Offers numerous practical examples and illustrations; Includes calibration of optical measurement systems for the inspection of MEMS; Presents the characterization of dynamics of MEMS
Bibliography Includes bibliographical references and index
Notes Online resource; title from PDF title page (EBSCO, viewed June 25, 2019)
Subject Industrial microscopy.
Microelectromechanical systems -- Inspection
Optical measurements.
Quality control -- Optical methods.
Industrial microscopy.
Optical measurements.
Quality control -- Optical methods.
TECHNOLOGY & ENGINEERING / Industrial Engineering.
TECHNOLOGY & ENGINEERING / Industrial Technology.
TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades.
Form Electronic book
Author Osten, Wolfgang, editor.
ISBN 0429186738