Title Integration of advanced micro- and nanoelectronic devices--critical issues and solutions : symposia held April 13-16, 2004, San Francisco, California, U.S.A. / editors: J. Morais ... [and others]

Published Warrendale, Pa. : Materials Research Society, [2004] ©2004

Copies

Location	Call no.	Vol.	Availability
W'PONDS	621.3815 Mor/Ioa 2004		AVAILABLE

Description xv, 471 pages : illustrations ; 24 cm Series Materials Research Society symposium proceedings ; v. 811 Materials Research Society symposia proceedings ; v. 811 Notes "This volume is the joint proceedings of papers presented in Symposium D, 'High-k Insulators and Ferroelectrics for Advanced Microelectronic Devices,' and Symposium E, 'Integration Challenges in Next-Generation Oxide-Based Nanoelectronics,' held April 13-16 at the 2004 MRS Spring Meeting in San Francisco, California."--p. xv Bibliography Includes bibliographical references and indexes Subject Microelectronics -- Equipment and supplies -- Congresses. Nanotechnology -- Congresses. Nanostructured materials -- Design and construction -- Congresses. Ferroelectric devices -- Congresses. Genre/Form Conference papers and proceedings. Author Morais, J. Materials Research Society. Fall Meeting (2004 : San Francisco, Calif.) Symposium on High-k Insulators and Ferroelectrics for Advanced Microelctronic Devices (2004 : Francisco, Calif.) Symposium on Integration Challenges in Next-Generation Oxide-Based Nanoelectronics (2004 : Francisco, Calif.) LC no. 2004275387 ISBN 155899761X

Other Titles High-k insulators and ferroelectrics for advanced microelectronic devices Integration challenges in next-generation oxide-based nanoelectronics

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