| Description |
xii, 312 pages : illustrations ; 25 cm |
| Contents |
Ch. 1. Introduction to MEMS devices -- Ch. 2. Mechanics of beam and diaphragm structures -- Ch. 3. Air damping -- Ch. 4. Electrostatic actuation -- Ch. 5. Capacitive sensing and effects of electrical excitation -- Ch. 6. Piezoresistive sensing |
| Summary |
"Micro-dynamics chapters form the main content of this book and cover the mechanics of micromechanical structures, air damping and its effect on the operation of MEMS devices, the electrostatic driving of mechanical actuators and the electro-mechanical interaction in capacitive sensors." "The chapters cover background knowledge, up-to-date developments and applied use in devices. In addition practical design problems are provided at the end of most chapters (with answers at the end of the book). Therefore, this book is suited for students, researchers and engineers who are studying or working on MEMS."--BOOK JACKET |
| Bibliography |
Includes bibliographical references and index |
| Subject |
Microelectromechanical systems.
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Microtechnology.
|
| Author |
ScienceDirect (Online service)
|
| ISBN |
0444516166 (hbk.) |
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