Title LIGA and its applications / edited by Volker Saile [and others]

Published Weinheim : Wiley-VCH, [2009] ©2009

Online access available from: Wiley Online Books    View Resource Record

Copies

Description 1 online resource (x, 479 pages) : illustrations Series Advanced micro & nanosystems ; 7 Advanced micro & nanosystems ; v. 7 Bibliography Includes bibliographical references and index Notes Print version record Subject Microelectromechanical systems. Microtechnology. Form Electronic book Author Saile, Volker. ISBN 1615834737 (electronic bk.) 3527316981 3527622578 9781615834730 (electronic bk.) 9783527316984 9783527622573

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