Title Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, editor

Published Bellingham, Wash., USA : SPIE Optical Engineering Press ; London, UK : Institution of Electrical Engineers, ©1997

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Description 1 online resource (2 volumes) : illustrations Series IEE materials and devices series ; 12A-12B IEE materials & devices series ; 12A-12B. Contents v. 1. Microlithography -- v. 2. Micromachining and microfabrication Bibliography Includes bibliographical references and indexes Notes Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL Print version record Subject Microlithography. Micromachining. Microfabrication. TECHNOLOGY & ENGINEERING -- Industrial Engineering. TECHNOLOGY & ENGINEERING -- Industrial Technology. TECHNOLOGY & ENGINEERING -- Manufacturing. TECHNOLOGY & ENGINEERING -- Technical & Manufacturing Industries & Trades. Microfabrication. Microlithography. Micromachining. Microtechniek. Moleculaire nanotechnologie. Microlithografie. Microlithographie. Micro-usinage. Micro-fabrication. Form Electronic book Author Rai-Choudhury, P ISBN 9781510607972 1510607978

Other Titles Microlithography, micromachining, and microfabrication

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