Title Journal of microlithography, microfabrication, and microsystems,

Published [Bellingham, WA] : SPIE-The International Society for Optical Engineering, [2002-©2006] ©2002-©2006 Began with: Vol. 1, no. 1 (Apr. 2002), ceased with: Vol. 5 (4) (Oct./Dec. 2006)

Online access available from: SPIE Digital Library    01 Jan. 2002 - 31 Dec. 2007 View Resource Record

Copies

Description Online resource Later Title Journal of micro/nanolithography, MEMS, and MOEMS (Online) Notes Mode of access: World Wide Web Vol. 1, numbers 1 (Apr. 2002), title from editorial (SPIE Digital Library site, viewed Apr 5, 2013) Vol. 5 (4) (Oct./Dec. 2006) (SPIE Digital Library site, viewed Apr 5, 2013) Subject Microelectronics -- Periodicals Microlithography -- Periodicals Microfabrication -- Periodicals Form Electronic journal Author Society of Photo-Optical Instrumentation Engineers LC no. 2013263115 ISSN 1537-1646

Other Titles JM3 J. microlithogr., microfabr., microsyst

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