Miniaturized Metal-Oxide Sensors -- Thermal Modelling of CMOS Microhotplates -- Microhotplates in CMOS Technology -- Monolithic Gas Sensor Systems -- Microsensor Arrays -- Conclusion and Outlook
Summary
"This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor proto-typing: theory and transducer modelling, microelectric design issues, and issues related to system and device microfabrication, packaging, and testing. A variety of different hotplates for different operation conditions is detailed, and a family of metal-oxide-covered microhotplate-based microsensor systems with increasing complexity is presented."--Jacket
Analysis
engineering
optische instrumenten
optical instruments
fysische chemie
physical chemistry
fysica
physics
optica
optics
Engineering (General)
Techniek (algemeen)
Bibliography
Includes bibliographical references (pages 113-121) and index