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Book Cover
E-book

Title CMOS hotplate chemical microsensors / M. Graf [and others]
Published Berlin ; New York : Springer, ©2007

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Description 1 online resource (xii, 125 pages) : illustrations (some color)
Series Microtechnology and MEMS, 1439-6599
Microtechnology and MEMS. 1439-6599
Contents Miniaturized Metal-Oxide Sensors -- Thermal Modelling of CMOS Microhotplates -- Microhotplates in CMOS Technology -- Monolithic Gas Sensor Systems -- Microsensor Arrays -- Conclusion and Outlook
Summary "This is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor proto-typing: theory and transducer modelling, microelectric design issues, and issues related to system and device microfabrication, packaging, and testing. A variety of different hotplates for different operation conditions is detailed, and a family of metal-oxide-covered microhotplate-based microsensor systems with increasing complexity is presented."--Jacket
Analysis engineering
optische instrumenten
optical instruments
fysische chemie
physical chemistry
fysica
physics
optica
optics
Engineering (General)
Techniek (algemeen)
Bibliography Includes bibliographical references (pages 113-121) and index
Notes English
Print version record
In Springer e-books
Subject Microelectromechanical systems -- Design and construction
Microfabrication.
TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics.
TECHNOLOGY & ENGINEERING -- Electronics -- Digital.
Microfabrication.
Microelectromechanical systems -- Design and construction.
Ingénierie.
Microelectromechanical systems -- Design and construction
Microfabrication
Form Electronic book
Author Graf, M. (Markus)
ISBN 9783540695622
3540695621
3540695613
9783540695615
9786610853816
6610853819
Other Titles Complementary metal oxide semiconductor hotplate chemical microsensors