| Description |
1 online resource (678 pages) |
| Contents |
Front cover; Preface; Editor-in-Chief; Contributors; Table of Contents; Introduction; Materials for Microelectro-mechanical Systems; MEMS Fabrication; LIGA and Micromolding; X-Ray-Based Fabrication; EFABTM Technology and Applications; Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization, and Reliability; Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide; Polymer Microsystems: Materials and Fabrication; Optical Diagnostics to Investigate the Entrance Length in Microchannels; Microfabricated Chemical Sensors for Aerospace Applications |
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Packaging of Harsh Environment MEMS DevicesFabrication Technologies for Nanoelectro-mechanical Systems; Molecular Self-Assembly: Fundamental Concepts and Applications; Index; Back cover |
| Summary |
Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this vo |
| Notes |
Print version record |
| Subject |
Microelectromechanical systems -- Design and construction
|
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Microfabrication.
|
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Microelectromechanical systems -- Design and construction
|
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Microfabrication
|
| Form |
Electronic book
|
| ISBN |
9781420036565 |
|
1420036564 |
|
1280643277 |
|
9781280643279 |
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