Title Fundamentals of microfabrication / Marc Madou

Published Boca Raton, Fla. : CRC Press, [1997] ©1997

Copies

Location	Call no.	Vol.	Availability
W'PONDS	621.38152 Mad/Fom		AVAILABLE

Description 589 pages, 22 unnumbered pages of plates : illustrations (some color) ; 29 cm Contents Ch. 1. Lithography -- Ch. 2. Pattern Transfer with Dry Etching Techniques -- Ch. 3. Pattern Transfer with Additive Techniques -- Ch. 4. Wet Bulk Micromachining -- Ch. 5. Surface Micromachining -- Ch. 6. LIGA -- Ch. 7. Comparison of Micromachining Techniques -- Ch. 8. Micromachine Development and Packaging -- Ch. 9. Scaling Laws, Actuators, and Power in Miniaturization -- Ch. 10. Microfabrication Applications -- App. A. Metrology Techniques for MEMS Bibliography Includes bibliographical references (pages 565-569) and index Subject Integrated circuits -- Design and construction. Lasers -- Industrial applications. Machining. Microelectronic packaging. Microelectromechanical systems -- Design and construction. Microelectronics -- Design and construction. Microelectronics. LC no. 96043344 ISBN 0849394511 (acid-free paper)

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