Title Dielectric films for advanced microelectronics / edited by Mikhail Baklanov, Martin Green, and Karen Maex

Published Chichester, England ; Hoboken, NJ : John Wiley & Sons, [2007] ©2007

Online access available from: Wiley Online Books    View Resource Record

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Description 1 online resource (xxii, 486 pages) : illustrations Series Wiley series in materials for electronic and optoelectronic applications Wiley series in materials for electronic and optoelectronic applications. Contents Low and ultralow dielectric constant films prepared by plasma-enhanced chemical vapor deposition / A. Grill -- Spin-on dielectric materials / Geraud Dubois, Robert D. Miller, Willi Volksen -- Positron annihilation spectroscopy / David W. Gidley, Hua-Gen Peng, Richard Vallery -- Structure characterization of nanoporous interlevel dielectric thin films with x-ray and neutron radiation / Christopher L. Soles [and others] -- Ellipsometric porosimetry / Mikhail R. Baklanov -- Mechanical and transport properties of low-k dielectrics / J.L. Plawsky [and others] -- Integration of low-k dielectric films in damascene processes / R.J.O.M. Hoofman [and others] -- ONO structures and oxynitrides in modern microelectronics : material science, characterization and application / Yakov Roizin, Vladimir Gritsenko -- Material engineering of high-k gate dielectrics / Akira Toriumi, Koji Kita -- Physical characterization of ultra-thin high-k dielectric / T. Conard, H. Bender, W. Vandervorst -- Electrical characterization of advanced gate dielectrics / Robin Degraeve [and others] -- Integration issues of high-k gate dielectrics / Yasuo Nara -- Anisotropic conductive film (ACF) for advanced microelectronic interconnects / Yi Li, C.P. Wong Summary The topic of thin films is an area of increasing℗¡importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices Bibliography Includes bibliographical references and index Notes Print version record Subject Dielectric films. Microelectronics -- Materials. Form Electronic book Author Baklanov, Mikhail, editor Green, Martin, editor Maex, Karen, editor Wiley InterScience (Online service) ISBN 0470017945 0470065419 (electronic bk.) 9780470017944 9780470065419 (electronic bk.) (hbk.) (hbk.)

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