Title Micro electro-fabrication / edited by Tanveer Saleh, Mohamed Sultan Mohamed Ali, Kenichi Takahata

Published Amsterdam ; Cambridge, MA : Elsevier, [2021]

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Description 1 online resource Series Micro and Nano Technologies Micro & nano technologies. Notes Includes index Online resource; title from digital title page (viewed on June 10, 2021) Subject Nanoelectronics. Microfabrication. Microfabrication Nanoelectronics Form Electronic book Author Saleh, Tanveer, editor Ali, Mohamed Sultan Mohamed, editor Takahata, Kenichi, editor ISBN 9780128231807 0128231807

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