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Book Cover
E-book

Title MEMS resonator filters / edited by Rajendra M. Patrikar
Published London, United Kingdom : The Institution of Engineering and Technology, 2020
©2020

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Description 1 online resource (xiii, 424 pages) : illustrations (mostly color)
Series IET materials, circuits and devices series ; 65
Materials, circuits and devices series ; 65.
Contents Introduction / Rajendra M. Patrikar -- Filter design / Rajesh Junghare, Raghvendra Deshmukh and Rajendra Patrikar -- Microelectromechanical resonators design : low-frequency resonators / Amol Morankar -- Microelectromechanical resonator design for high frequency / Prasanna Deshpande and Rajesh Pande -- Finite-element modeling of RF MEMS resonators / Ravi Solanki, Sakthi Swarrup J and Ashutosh Mahajan -- Fabrication of low-frequency resonators / Amol Morankar -- Fabrication of high-frequency resonators / Prasanna Deshpande and Rajesh Pande -- Filter and oscillator design using SAW/BAW resonators / Motoaki Hara -- Testing and verification of MEMS resonator filters / Vasu Pulijala -- 3D packaging for the integration of hterogeneous systems / Pavani Vamsi Krishna Nittala, Prosenjit Sen, K.N. Bhat, and M.M. Nayak -- Reliability issues of MEMS resonators / Poorvi K. Joshi and Meghana A. Hasamnis
Summary This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in various frequency ranges are discussed
Bibliography Includes bibliographical references and index (pages 413-424)
Notes Online resource; title from PDF title page (IET, viewed June 25, 2020)
Subject Microelectromechanical systems.
Filters and filtration.
Micro-Electrical-Mechanical Systems
Filters and filtration.
Microelectromechanical systems.
bulk acoustic wave devices.
finite element analysis.
integrated circuit design.
integrated circuit manufacture.
integrated circuit modelling.
integrated circuit packaging.
integrated circuit reliability.
integrated circuit testing.
microfabrication.
micromechanical resonators.
radiofrequency filters.
radiofrequency integrated circuits.
radiofrequency oscillators.
surface acoustic wave resonator filters.
surface acoustic wave resonators.
three-dimensional integrated circuits.
Form Electronic book
Author Patrikar, Rajendra M., editor
ISBN 9781785618970
1785618970
1523129808
9781523129805