Title Microelectronic failure analysis : desk reference : 2001 supplement / prepared under the direction of the Electronic Device Failure Analysis Society Publications Committee

Published Materials Park, OH : ASM International, ©2001

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Description 1 online resource (v, 171 pages) : illustrations Contents Preface -- Contents -- Focused Ion Beam Backside Isolation Techniques -- Package/Sample Cross Sectioning -- Copper Deprocessing -- Atomic Force Microscopy, Scanning Probe Microscopy, and Scanning Capacitance Microscopy -- Supplementary Information Bibliography Includes bibliographical references and index Notes Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL Print version record digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL Subject Electronics -- Materials -- Testing -- Handbooks, manuals, etc Microelectronics -- Materials -- Testing -- Handbooks, manuals, etc Microelectronics -- Materials -- Defects -- Handbooks, manuals, etc Electronic apparatus and appliances -- Testing -- Handbooks, manuals, etc Semiconductors -- Defects -- Handbooks, manuals, etc Microelectronics -- Defects -- Handbooks, manuals, etc TECHNOLOGY & ENGINEERING -- Electronics -- Digital. TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics. Electronic apparatus and appliances -- Testing Electronics -- Materials -- Testing Microelectronics -- Materials -- Defects Microelectronics -- Materials -- Testing Semiconductors -- Defects Genre/Form Handbooks and manuals Form Electronic book Author Electronic Device Failure Analysis Society. ISBN 9781615032655 1615032657

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