Microelectronic failure analysis : desk reference : 2001 supplement / prepared under the direction of the Electronic Device Failure Analysis Society Publications Committee
Preface -- Contents -- Focused Ion Beam Backside Isolation Techniques -- Package/Sample Cross Sectioning -- Copper Deprocessing -- Atomic Force Microscopy, Scanning Probe Microscopy, and Scanning Capacitance Microscopy -- Supplementary Information
Bibliography
Includes bibliographical references and index
Notes
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