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Subjects (1-3 of 3)
Microelectromechanical systems -- Materials
1
2015
Handbook of silicon based MEMS materials and technologies
Second edition
London, UK : William Andrew is an imprint of Elsevier, 2015
Rating:
Electronic Resources
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2
2010
Handbook of silicon based MEMS materials and technologies
1st ed
Rating:
Electronic Resources
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3
2010
Handbook of silicon based MEMS : materials & technologies
Rating:
Electronic Resources
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