Title Optical Inspection of Microsystems, Second Edition

Edition 2nd ed Published Milton : CRC Press LLC, 2019 ©2020

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Description 1 online resource (585 pages) Notes Publisher supplied metadata and other sources Subject Microelectromechanical systems-Inspection Quality control -- Optical methods. Optical measurements. Industrial microscopy. Industrial microscopy. Optical measurements. Quality control -- Optical methods. Form Electronic book ISBN 9781498779500 1498779506 0429547358 9780429547355

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