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Subjects (1-5 of 5)
Microelectromechanical systems -- Materials
1
E-book
2015

Handbook of silicon based MEMS materials and technologies



Second edition
London, UK : William Andrew is an imprint of Elsevier, 2015

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4
E-book
2015

Handbook of silicon based MEMS : materials & technologies



Second edition
Norwich : William Andrew, 2015

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5
E-book
2010

MEMS materials and processes handbook




New York ; London : Springer, 2010

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