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E-book

Title Advances in CMP/polishing technologies for the manufacture of electronic devices / edited by Toshiro Doi, Ioan D. Marinescu, Syuhei Kurokawa
Edition 1st ed
Published Oxford : William Andrew, 2012
Online access available from:
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Description 1 online resource (xii, 317 pages)
Summary CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. This title presents the developments and technological innovations in the field - making R & D accessible to the wider engineering community
Notes Includes index
Subject Electrolytic polishing.
Grinding and polishing.
electropolishing.
Electrolytic polishing
Grinding and polishing
Form Electronic book
Author Doi, Toshiro.
Marinescu, Ioan D.
Kurokawa, Syuhei.
ISBN 9781437778595
1437778593