01 Title.pdf; 02 Cover Page; 03 REVISED eBooks End User License Agreement-Website; 04 Dedication; 05 Content; 06 Foreword; 07 Preface; 08 Part 01; 09 Chapter 01; 10 Chapter 02; 11 Part 2; 12 Chapter 03; 13 Chapter 04; 14 Chapter 05; 15 Part 03; 16 Chapter 06; 17 Chapter 07; 18 Chapter 08; 19 Part 04; 20 Chapter 09; 21 Chapter 10; 22 Chapter 11; 23 Conclusion and Outlook; 24 Appendix; 25 Index
Summary
This book surveys the major and newly developed techniques for semiconductor strain metrology. This e-book employs a tutorial approach to explain the principles and applications of each technique specifically tailored for graduate students and postdoctoral researchers
