| Description |
1 online resource (xx, 303 pages) : illustrations |
| Series |
Advanced micro & nanosystems ; v. 6 |
|
Advanced micro & nanosystems ; v. 6.
|
| Contents |
Machine derived contents note: Preface. -- Foreword. -- List of Contributors. -- Overview. -- 1 Evaluation of Mechanical Properties of MEMS Materials and Their Standardization (Toshiyuki Tsuchiya). -- 2 Elastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating?Substrate Systems (Mototsugu Sakai) -- 3 Thin-fi lm Characterization Using the Bulge Test (Oliver Paul, Joao Gaspar). -- 4 Uniaxial Tensile Test for MEMS Materials (Takahiro Namazu). -- 5 On-chip Testing of MEMS (Harold Kahn). -- 6 Reliability of a Capacitive Pressure Sensor (Fumihiko Sato, Hideaki Watanabe, Sho Sasaki). -- 7 Inertial Sensors (Osamu Torayashiki, Kenji Komaki). -- 8 Inertial Sensors (Noriyuki Yasuik). -- 9 Reliability of MEMS Variable Optical Attenuator (Hiroshi Toshiyoshi, Keiji Isamoto, Changho Chong). -- 10 Eco Scan MEMS Resonant Mirror (Yuzuru Ueda, Akira Yamazaki). -- Index |
| Notes |
"Testing of materials and devices"--Cover |
| Bibliography |
Includes bibliographical references and index |
| Notes |
Print version record |
| Subject |
Microelectromechanical systems -- Reliability
|
|
TECHNOLOGY & ENGINEERING -- Mechanical.
|
| Form |
Electronic book
|
| Author |
Tsuchiya, Toshiyuki
|
|
Tabata, Osamu, 1956-
|
| ISBN |
9783527622139 |
|
3527622136 |
|
9783527622566 |
|
352762256X |
|
9783527675036 |
|
3527675035 |
|
9783527314942 |
|
3527314946 |
|
