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E-book

Title Handbook of thin film process technology : 98/1 reactive sputtering / editors, David A. Glocker, S. Ismat Shah ; guest editor, William D. Westwood
Published Boca Raton, FL : CRC Press, 2018

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Description 1 online resource : illustrations
Series CRC revivals
CRC revivals.
Contents Cover; Title Page; Copyright Page; Contents; A5: Reactive Sputtering Coordinating; A5.0 Reactive Sputtering: Introduction and General Discussion; A5.1 Reactive pulsed DC magnetron sputtering and control; A5.2 AC and RF reactive sputtering; A5.3 Modeling of the reactive sputtering process; Appendix A: List of Contributors; Index
Bibliography Includes bibliographical references and index
Notes Print version record
Subject Thin films -- Handbooks, manuals, etc
Surfaces (Technology) -- Handbooks, manuals, etc
SCIENCE -- Energy.
SCIENCE -- Mechanics -- General.
SCIENCE -- Physics -- General.
Surfaces (Technology)
Thin films
Genre/Form handbooks.
Handbooks and manuals
Handbooks and manuals.
Guides et manuels.
Form Electronic book
Author Glocker, David A., editor.
Shah, S. Ismat, editor.
Westwood, William D. (William Dickson), 1937- editor.
ISBN 9781351081238
1351081233
9781351072786
1351072781
Other Titles 98/1 reactive sputtering
Thin film process technology