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Author
Sarangan, Andrew, author
Title
Nanofabrication : principles to laboratory practice / Andrew Sarangan
Published
Boca Raton : CRC Press, Taylor & Francis Group, [2017]
©2017
Click on the following:
ProQuest Ebook Central
Copies
Description
1 online resource : text file, PDF
Series
Optical sciences and applications of light
Optical sciences and applications of light.
Contents
Chapter 1. Introduction to micro- and nanofabrication -- Chapter 2. Fundamentals of vacuum and plasma technology -- Chapter 3. Physical and chemical vapor deposition -- Chapter 4. Thin-film optics -- Chapter 5. Substrate materials -- Chapter 6. Lithography -- Chapter 7. Wet chemical and plasma etching -- Chapter 8. Doping, surface modifications, and metal contacts -- Chapter 9. Metrology for device fabrication
Bibliography
Includes bibliographical references and index
Subject
Nanolithography.
Nanostructured materials -- Design and construction
Semiconductors -- Etching.
Nanoelectronics -- Experiments
Nanolithography
Semiconductors -- Etching
Genre/Form
handbooks.
Handbooks and manuals.
Guides et manuels.
Form
Electronic book
ISBN
9781315370514
1315370514
1498725597
9781498725590
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