| Description |
1 online resource (ix, 174 pages) : illustrations |
| Series |
Microsystems and nanosystems, 2198-0063 |
|
Microsystems and nanosystems, 2198-0063
|
| Contents |
Introduction to levitation micro-systems -- Micro-fabrication techniques -- Analytical modelling -- Quasi-finite element modelling -- Inductive levitation micro-systems -- Hybrid levitation micro-systems -- Mechanical thermal noise in levitated micro-gyroscopes |
| Summary |
This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and -actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and -accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements |
| Bibliography |
Includes bibliographical references and index |
| Notes |
Online resource; title from PDF title page (SpringerLink, viewed February 8, 2021) |
| Subject |
Microelectromechanical systems.
|
|
Microactuators.
|
|
Micro-Electrical-Mechanical Systems
|
|
Microelectromechanical systems
|
|
Microactuators
|
|
Materials science
|
|
Nanotechnology
|
| Form |
Electronic book
|
| ISBN |
9783030589080 |
|
3030589080 |
|
