Title IEEE micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines and robots : proceedings, Travemünde, Germany, 4 February-7 February 1992 / W. Benecke, H.-C. Petzold, eds. ; sponsored by the IEEE Robotics and Automation Society and in cooperation with the German IEEE Section

Published [New York] : Institute of Electrical and Electronics Engineers, 1992

Copies

Location	Call no.	Vol.	Availability
W'PONDS	620.4 Ben/Ime		AVAILABLE

Description xv, 240 pages : illustrations ; 30 cm Notes "IEEE Micro Electro Mechanical Systems Workshop"--Spine "IEEE catalog number 92CH3093-2." Bibliography Includes bibliographical references Issuing Body Papers presented at the fifth IEEE Workshop on Micro Electro Mechanical Systems (MEMS '92) Notes Print version record Subject Actuators -- Congresses. Detectors -- Congresses. Microelectromechanical systems -- Congresses. Robotics -- Congresses. Genre/Form Conference papers and proceedings. Author Benecke, W. (Wolfgang) Petzold, H.-C. (Hans-Christian) IEEE Robotics and Automation Society. Institute of Electrical and Electronics Engineers. German Section. IEEE Workshop on Micro Electro Mechanical Systems (1992 : Travemünde, Lübeck, Germany) LC no. 91058683 ISBN 0780304977 (softbound) 0780304985 (casebound) 0780304993 (microfiche)

Other Titles IEEE Micro Electro Mechanical Systems Workshop Also known as: MEMS '92 Electronic reproduction has title: Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings, "An investigation of micro structures, sensors, actuators, machines and robot", IEEE MEMS '92

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