| Description |
1 online resource (xxxv, 406 pages) : illustrations |
| Contents |
Introduction -- Phenomenological Description of the Charged Particle Transport -- Macroscopic Plasma Characteristics -- Elementary Processes in Gas Phase and on Surfaces -- The Boltzmann Equation and Transport Equations of Charged Particles -- General Properties of Charged Particle Transport in Gases -- Modeling of Nonequilibrium (Low Temperature) Plasmas -- Numerical Procedure of Modeling --Capacitively Coupled Plasma -- Inductively Coupled Plasma -- Magnetically Enhanced Plasma -- Plasma Processing and Related Topics -- Atmospheric-Pressure, Low-Temperature Plasma |
| Summary |
Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods required to bring these technologies from the laboratory to the factory |
| Bibliography |
Includes bibliographical references and index |
| Notes |
Print version record |
| Subject |
Plasma engineering.
|
|
TECHNOLOGY & ENGINEERING -- Mechanical.
|
|
Plasma engineering
|
| Form |
Electronic book
|
| Author |
Petrović, Z., author
|
| ISBN |
9781482222104 |
|
1482222108 |
|
