| Description |
1 online resource |
| Contents |
Preface and Acknowledgements -- Introduction -- 1. Kinetic Theory of Gases -- 2. Flow of Gas and Conductance -- 3. Surface Phenomena -- 4. Interaction of Neutrals, Charged Particles and Radiation with Gases in Vacuum -- 5. Measurement of Pressure -- 6. Vacuum Pumps -- 7. System Design -- 8. Vacuum Measurement Methods -- 9. Vacuum Materials, Hardware, Fabrication Techniques, Cleaning Processes and Surface Treatment -- 10. Leak Detection -- 11. Extreme High Vacuum -- 12. Applications |
| Summary |
Vacuum is important in science and industry. The study of interaction of charged particles, neutrons and radiation with each other and solid surfaces requires a vacuum environment for reliable investigations. This book explains the basics of vacuum science and technology and is written for students, scientists, technicians and engineers-- Provided by publisher |
| Bibliography |
Includes bibliographical references and index |
| Notes |
Online resource; title from digital title page (viewed on March 18, 2019) |
| Subject |
Vacuum technology.
|
|
TECHNOLOGY & ENGINEERING -- Mechanical.
|
|
Vacuum technology.
|
| Form |
Electronic book
|
| ISBN |
9780429503948 |
|
0429503946 |
|
9780429995415 |
|
0429995415 |
|
9780429995422 |
|
0429995423 |
|
9780429995408 |
|
0429995407 |
|
