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Authors (Last name first) (1-4 of 4)
Lindroos, Veikko,
1
E-book
2010

Handbook of Silicon Based MEMS Materials and Technologies


Lindroos, Veikko, author
First edition
William Andrew, 2010

Rating:

 
 
4
E-book
2015

Handbook of silicon based MEMS : materials & technologies



Second edition
Norwich : William Andrew, 2015

Rating:

 
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