| Description |
1 online resource |
| Contents |
Preface; Organization; Level; Some limitations; Guide to the use of this text; Selected references on MEMS; Special acknowledgments; Final note; 1 Introduction; 1.1 Background; 1.2 Some terminology; 1.3 Electromechanical systems; 1.4 Conclusion; 2 Circuit-based modeling; 2.1 Fundamentals of circuit theory; 2.1.1 Motivation; 2.1.2 Kirchhoffs current and voltage laws; 2.1.3 Circuit elements; 2.1.4 Tellegens theorem: power and energy; 2.1.5 AC circuits, impedance, and admittance; 2.2 Circuit models for capacitive devices; 2.2.1 Basic RC circuit building block |
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2.2.2 The series capacitive circuit2.2.3 The parallel capacitive circuit; 2.2.4 Special cases: series and parallel capacitance; 2.2.5 Summary; 2.3 Two-port networks; 2.3.1 Impedance and admittance matrices; 2.3.2 The transmission matrix; 2.3.3 Cascaded two-port networks; 2.3.4 Some important two-port networks; 2.3.5 The gyrator and the transformer; 2.3.6 Embedded networks; 2.3.7 Source and impedance reflection; 2.4 Summary; 3 Capacitive lumped parameter electromechanics; 3.1 Basic assumptions and concepts; 3.1.1 The lossless electromechanical coupling |
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3.1.2 State variables and conservative systems3.1.3 Evaluation of energy function; 3.1.4 Force of electrical origin; 3.2 Coenergy -- an alternate energy function; 3.2.1 Definition of coenergy; 3.2.2 Integral evaluation of coenergy; 3.2.3 Evaluation of force of electrical origin; 3.3 Couplings with multiple ports; 3.3.1 Energy conservation relation; 3.3.2 System with two electrical and two mechanical ports; 3.4 Basic capacitive transducer types; 3.4.1 Variable-gap capacitors; 3.4.2 Variable-area capacitors; 3.4.3 Comparison of variable-gap and variable-area actuators; 3.4.4 Transducer stroke |
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3.4.5 The comb-drive geometry3.4.6 Another variable-area capacitor; 3.5 Rotational transducers; 3.5.1 Modeling rotational electromechanics; 3.5.2 Torque of electrical origin; 3.5.3 An example; 3.6 Electrets; 3.7 Non-linear conservative electromechanical systems; 3.7.1 Conservation laws for capacitive devices; 3.7.2 Non-linear oscillations and stability; 3.7.3 Numerical solutions; 3.7.4 Constant charge constraint; 3.7.5 Discussion; 3.8 Summary; 4 Small-signal capacitive electromechanical systems; 4.1 Background; 4.2 Linearized electromechanical transducers; 4.2.1 Some preliminaries |
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4.2.2 Linearization in terms of energy and coenergy4.2.2.1 Energy formulation; 4.2.2.2 Coenergy formulation; 4.3 Electromechanical two-port networks; 4.3.1 The transducer matrix; 4.3.1.1 Energy-based M-form matrix; 4.3.1.2 Coenergy-based N-form matrix; 4.3.2 The linear capacitive transducer; 4.3.2.1 M-form matrix coefficients; 4.3.2.2 N-form matrix coefficients; 4.3.3 Important special cases; 4.3.4 Transducers with angular displacement; 4.3.5 Multiport electromechanical transducers; 4.4 Electromechanical circuit models; 4.4.1 Analogous variables |
| Summary |
A comprehensive MEMS textbook, with worked examples and numerous homework problems |
| Bibliography |
Includes bibliographical references and index |
| Notes |
Print version record |
| Subject |
Microelectromechanical systems.
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Micro-Electrical-Mechanical Systems
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TECHNOLOGY & ENGINEERING -- Electronics -- Optoelectronics.
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TECHNOLOGY & ENGINEERING -- Electronics -- Digital.
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TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics.
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Microelectromechanical systems
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| Form |
Electronic book
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| Author |
Jones, Thomas B.
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Nenadic, Nenad G.
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| ISBN |
9781139032605 |
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1139032607 |
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1299546315 |
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9781299546318 |
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0521764831 |
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9780521764834 |
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9781139609746 |
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1139609742 |
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9781139624626 |
|
1139624628 |
|
9781139611602 |
|
1139611607 |
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9781139615327 |
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1139615327 |
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