Title Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings / IEEE, Fort Lauderdale, Florida, February 7-10, 1993 ; sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division

Published [New York] : Institute of Electrical and Electronics Engineers ; Piscataway, NJ : IEEE Service Center, [1993] ©1993

Copies

Location	Call no.	Vol.	Availability
W'PONDS	620.4 Iee/Mem 1993		AVAILABLE

Description xvii, 294 pages : illustrations ; 28 cm Notes "1993 IEEE Workshop on Micro Electro Mechanical Systems"--P. iii "IEEE catalog number 93CH3265-6." Title on spine: IEEE Micro Electro Mechanical Systems Workshop Bibliography Includes bibliographical references and index Subject Actuators -- Congresses. Detectors -- Congresses. Electromechanical devices -- Congresses. Microelectronics -- Congresses. Genre/Form Conference papers and proceedings. Author American Society of Mechanical Engineers. Dynamic Systems and Control Division. IEEE Robotics and Automation Society. IEEE Workshop on Micro Electro Mechanical Systems (1993 : Fort Lauderdale, Fla.) LC no. 92056273 ISBN 078030957X (softbound) 0780309588 (casebound) 0780309596 (microfiche)

Other Titles IEEE micro electro mechanical systems IEEE micro electro mechanical systems workshop

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