| Description |
1 online resource (xxxv, 1187 pages) : illustrations (some color) |
| Series |
MEMS reference shelf |
|
MEMS reference shelf.
|
| Contents |
The MEMS Design Process / Tina L. Lamers and Beth L. Pruitt -- Additive Processes for Semiconductors and Dielectric Materials / Chris Zorman, Robert C. Roberts, and Li Chen -- Additive Processes for Metals / David P. Arnold, Monika Saumer, and Yong-Kyu Yoon -- Additive Processes for Polymeric Materials / Ellis Meng, Xin Zhang, and William Benard -- Additive Processes for Piezoelectric Materials : Piezoelectric MEMS / Ronald G. Polcawich, Jeffrey S. Pulskamp -- Materials and Processes in Shape Memory Alloy / Takashi Mineta and Yoichi Haga -- Dry Etching for Micromachining Applications / Srinivas Tadigadapa and Franz Lärmer -- MEMS Wet-Etch Processes and Procedures / David W. Burns -- MEMS Lithography and Micromachining Techniques / Daniel R. Hines, Nathan P. Siwak, Lance A. Mosher, and Reza Ghodssi -- Doping Processes for MEMS / Alan D. Raisanen -- Wafer Bonding / Shawn J. Cunningham and Mario Kupnik -- MEMS Packaging Materials / Ann Garrison Darrin and Robert Osiander -- Surface Treatment and Planarization / Pinyen Lin, Roya Maboudian, Carlo Carraro, Fan-Gang Tseng, Pen-Cheng Wang, and Yongqing Lan -- MEMS Process Integration / Michael A. Huff, Stephen F. Bart, and Pinyen Lin |
| Summary |
MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Selection Guide' and a 'Material Database' guides the reader through the selection of appropriate materials for the required task at hand. The 'Processes' section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs. The book also: Provides a comprehensive catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMS Discusses specific MEMS fabrication techniques such as additive, subtractive, and lithography/patterning, as well as wafer bonding, doping, surface treatment/preparation, and characterization techniques Provides the reader with a quick check list of the advantage/disadvantage of fabrication MEMS Material and Processes Handbook will be a valuable book for researchers, engineers and students working in MEMS and materials processing |
| Bibliography |
Includes bibliographical references and index |
| Notes |
Print version record |
| Subject |
Microelectromechanical systems -- Materials
|
|
Microelectromechanical systems.
|
|
Micro-Electrical-Mechanical Systems
|
|
TECHNOLOGY & ENGINEERING -- Electronics -- Digital.
|
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TECHNOLOGY & ENGINEERING -- Electronics -- Microelectronics.
|
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Ingénierie.
|
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Microelectromechanical systems
|
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Microelectromechanical systems -- Materials
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| Form |
Electronic book
|
| Author |
Ghodssi, Reza, editor
|
|
Lin, Pinyen, editor
|
| ISBN |
9780387473185 |
|
0387473181 |
|
