Title Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK / edited by J.D. Murphy

Published Durnten-Zurich : Trans Tech publications Ltd, [2014]

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Description 1 online resource (xiv, 516 pages) : illustrations (black and white Series Diffusion and defect data. Pt. B, Solid state phenomena, 1012-0394 ; volumes 205/206 Diffusion and defect data. Pt. B, Solid state phenomena ; v. 205/206. Bibliography Includes bibliographical references and index Notes Print version record Subject Semiconductors -- Defects -- Congresses Getters -- Congresses TECHNOLOGY & ENGINEERING -- Mechanical. Getters Semiconductors -- Defects Genre/Form Conference papers and proceedings Form Electronic book Author Murphy, J. D., editor ISBN 3038262056 9783038262053

Other Titles Gettering and defect engineering in semiconductor technology 15

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