Description |
1 online resource (521 pages) : illustrations |
Contents |
Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I -- Wafer Planarization and Bonding -- Enabling Technologies II -- Contamination Control -- Device Fabrication -- An Example |
Summary |
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control |
Bibliography |
Includes bibliographical references and index |
Notes |
Print version record |
Subject |
Microelectromechanical systems.
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Micro-Electrical-Mechanical Systems
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Microelectromechanical systems
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Form |
Electronic book
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Author |
Saile, Volker, author
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Leuthold, Jürg, author
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ISBN |
9783662443958 |
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3662443953 |
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3662443945 |
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9783662443941 |
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