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Book Cover
E-book
Author Erdmann, Andreas

Title Optical and EUV Lithography
Published Bellingham : Society of Photo-Optical Instrumentation Engineers, 2021

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Description 1 online resource (0 p.)
Contents Intro -- Copyright -- Contents -- Preface -- Abbreviations and Acronyms -- Frequently Used Symbols -- 1 Overview of Lithographic Processing -- 2 Image Formation in Projection Lithography -- 3 Photoresists -- 4 Optical Resolution Enhancements -- 5 Material-Driven Resolution Enhancements -- 6 Lithography with Extreme-Ultraviolet Light -- 7 Optical Lithography Beyond Projection Imaging -- 8 Lithographic Projection Systems: Advanced Topics -- 9 Mask and Wafer Topography Effects in Lithography -- 10 Stochastic Effects in Advanced Lithography -- Index -- About the Author
Summary "State-of-the-art semiconductor lithography combines the most advanced optical systems of our world with cleverly designed and highly optimized photochemical materials and processes to fabricate micro- and nanostructures that enable our modern information society. The precise fabrication and metrology of nanopatterns requires an in depth understanding of all involved physical and chemical effects. This book tries to support such understanding from a modeling-driven perspective, but without a heavy mathematical apparatus. The material for this book was compiled in many years of teaching lectures on "Optical lithography Technology, Physical Effects, and Modeling" at the Friedrich-Alexander-University Erlangen-Nuremberg and in the preparation of dedicated courses on special aspects of lithography. The book is intended to help interested students with background in physics, optics, computational engineering, mathematics, chemistry, material science, nanotechnology and other areas to get started in the fascinating field of lithographic techniques for nanofabrication. It should also help senior engineers and managers to widen their view on alternative methods and applications"-- Provided by publisher
Notes Description based upon print version of record
Subject Photolithography.
Extreme ultraviolet lithography.
photolithography.
Extreme ultraviolet lithography
Photolithography
Form Electronic book
ISBN 9781510639027
1510639020